設備名稱 Equipment Name

全自動石墨舟裝卸片機  Automatic Wafer Handling System for PECVD

設備型號 Equipment Model

SMZ-IV

設備用途 Equipment Application

本設備為在線式，可與一臺或兩臺側出舟設備對接，實現石墨舟的自動傳輸和硅片自動裝卸，滿足在太陽能電池片生產過程中的PECVD工藝前后，將片籃中的硅片自動裝載到石墨舟，并將石墨舟輸送到PECVD設備中，或將PECVD設備中的石墨舟輸送到本設備，并將石墨舟中的硅片自動裝載到片籃中。

Inline equipment, which can be integrated with one or two  boat-boat interface PECVD equipment and realize the transportation of graphite boat and wafers load & unload automatically. This equipment can be applied in the process before and after PECVD process, which can load the wafers from the cassette to the graphite boat and transport the fulfilled boat to the PECVD equipment or transport the processed boat to this equipment and unload the wafers from the graphite boat to the cassette automatically. 

技術特點  Features

1、設備模塊化設計，可以在線連接?臺或兩臺PECVD。
With modular design,which can inline integrated with one or two sets of PECVD equipment.

2、采用PC機控制，平板電腦菜單操作，簡單明了。
With PC control,tablet computer operation,which is easy and clear for operation.

3、具有在線隱裂?檢測、在線膜厚檢測、在線色差檢測、在線CCD翹片檢測及NG片自動處理功能（選配功能，價格另計）。
Online micro-crack detection,film thickness detection,color inspection system,online CCD wafer warpage detection and automatic dealing with NG wafers(need extra charges).

4、在線/離線配置。
Inline/offline configuration.

5、匹配AGV,RFID,可選配MES功能。

Compatible with AGV,RFID system,MES function optional.

設備參數  Parameters