設備名稱 Equipment Name

全自動石英舟裝卸片機  Automatic Wafer Handling System for DOA Equipment

設備型號 Equipment Model

SYZ-VI-B

設備用途 Equipment Application

集裝片和卸片一體，可從石英舟中把擴散后的硅片卸到片籃中，也可從片籃中將制絨后的硅片裝入石英舟中。可在?個石英舟插槽中插?兩片，實現單面擴散片工藝，也可在?個石英舟插槽中插入一片，實現雙面擴散片工藝。采用裝片與卸片可連續銜接?式，實現連續生產；也可單獨裝片或單獨卸片。
Integrated wafer loading& unloading, unloading the wafers from the quartz boat to the cassette or loading the wafers from the cassette to the quartz boat. Available for double back-to-back wafers in one slot which realize single side diffusion or available for single wafer in a slot for double-side diffusion. With continuous wafer loading&unloading can guarantee the continuous production . Or be used only for wafer loading or unloading is also available.

技術特點  Features

1、采用進口六軸機械手裝卸片，確保硅片取放高可靠性，降低硅片破碎率及劃傷。
Six axis robot from world leading brand to load/unload wafers to ensure high reliability of wafer pick & place,and reduce the breakage rate and scratches on wafers.

2、HMI采用（IPC）工業計算機運行上位軟件，通過網絡通訊實現高速數據交互。

HMI adopts industrial computer (IPC) to run software and realize high-speed data interaction through network communication.

3、頂齒、吸盤重要零部件采用特殊加工工藝，極大降低頂齒印、吸盤印，頂齒、吸盤可實現快速更換。
Special processing technology is adopted for important parts such as combs and grippers which greatly reduce comb marks and gripper marks, and the comb and gripper can be replaced quickly.  

4、可選配MES功能；可選配方阻檢測模組；可選配AGV，自動化可實現一拖二配置，我司可根據客戶需求定制個性化功能。
MES function/ sheet resistance detection module/ AGV system are optional; automation can be 1-by-2,functions can be customized according to customer needs.

設備參數  Parameters